JPH0446860Y2 - - Google Patents

Info

Publication number
JPH0446860Y2
JPH0446860Y2 JP1986074643U JP7464386U JPH0446860Y2 JP H0446860 Y2 JPH0446860 Y2 JP H0446860Y2 JP 1986074643 U JP1986074643 U JP 1986074643U JP 7464386 U JP7464386 U JP 7464386U JP H0446860 Y2 JPH0446860 Y2 JP H0446860Y2
Authority
JP
Japan
Prior art keywords
substrate
processing liquid
main surface
ejection
spray device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986074643U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62187680U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986074643U priority Critical patent/JPH0446860Y2/ja
Publication of JPS62187680U publication Critical patent/JPS62187680U/ja
Application granted granted Critical
Publication of JPH0446860Y2 publication Critical patent/JPH0446860Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Coating Apparatus (AREA)
JP1986074643U 1986-05-20 1986-05-20 Expired JPH0446860Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986074643U JPH0446860Y2 (en]) 1986-05-20 1986-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986074643U JPH0446860Y2 (en]) 1986-05-20 1986-05-20

Publications (2)

Publication Number Publication Date
JPS62187680U JPS62187680U (en]) 1987-11-28
JPH0446860Y2 true JPH0446860Y2 (en]) 1992-11-05

Family

ID=30920044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986074643U Expired JPH0446860Y2 (en]) 1986-05-20 1986-05-20

Country Status (1)

Country Link
JP (1) JPH0446860Y2 (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH062260Y2 (ja) * 1989-09-13 1994-01-19 東京応化工業株式会社 スプレー装置
JPH0734890B2 (ja) * 1991-10-29 1995-04-19 インターナショナル・ビジネス・マシーンズ・コーポレイション スピン・コーティング方法
AU2003234811A1 (en) * 2002-06-07 2003-12-22 Tokyo Electron Limited Substrate processing device, substrate processing method, and developing device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5564234A (en) * 1978-11-06 1980-05-14 Mitsubishi Electric Corp Developing method of resist film
JPS5575223A (en) * 1978-12-04 1980-06-06 Fujitsu Ltd Manufacturing semiconductor device

Also Published As

Publication number Publication date
JPS62187680U (en]) 1987-11-28

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